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FROM:
T.W. Allen, J. Silverstone, N. Ponnampalam, T. Olsen, A Meldrum and R.G. DeCorby, “High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO2 multilayers”, Optics Express, Vol. 19, No. 20, p 18903-18909, 2011
ABSTRACT: Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO2 multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 103) and quality factors (Q > 104 in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects. Degenerate Hermite-Gaussian and Laguerre-Gaussian modes were observed, suggesting a high degree of cylindrical symmetry. Given their silicon-based fabrication, these cavities hold promise as building blocks for integrated optical sensing systems.
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